Research Information System
Journal of Engineering Materials and Technology, vol.131, no.4, pp.412021-4120215, 2009 (SCI-Expanded)
Thin film technology is pervasive in many applications, including microelectronics, optics, magnetic, hard and corrosion resistant coatings, micromechanics, etc. Therefore, basic research activities will be necessary in the future to increase knowledge and understanding and to develop predictive capabilities for relating fundamental physical and chemical properties to the microstructure and performance of thin films in various applications. In basic research, special model systems are needed for quantitative investigation of the relevant and fundamental processes in thin film material science. Because of the diversity of the subject and the sheer volume of the publications, a complete a review of the area of the current study is focused particularly on the experimental and theoretical investigations for the inelastic behavior of the micro-/nanostructured thin films. Copyright © 2009 by ASME.